EV Group and Panasonic Team Up On Resist Processing Solution For Plasma Dicing

EV Group (EVG) and Panasonic Smart Factory Solutions Co., Ltd. announced today that both companies have teamed up to provide a novel resist processing solution for plasma dicing that is developed for emerging applications, such as Internet of Things (IoT) sensors, MEMS, RFID, CMOS image sensors and thinned memories. This advanced solution, which incorporates the EVG®100 series of resist processing systems and Panasonic's APX300 Dicer Module plasma dicer, became available from March 13, 2019.